摘要
本文报道了一种用Ａｒ＋以不同入射角轰击Ａｇ表面时形成锥体形貌的方法．不同溅射表面所形成锥体丛的平均高度分别为：（ａ）入射角φ为２０°时约１μｍ；（ｂ）φ＝４０°时约１５μｍ；（ｃ）φ＝６０°时约７μｍ；（ｄ）φ＝７０°时约为８μｍ，并随入射角φ的增大而增加．我们认为这些变化特征是在离子轰击表面的溅射过程中形成的．
A method of cone-shaped topography formation on the surface of silver by Ar + ion bombardment at different angle (φ) of incidence is proposed. Each sputtered surface forms colony of cones whose average altitudes are roughtly (a) ～1μm for φ=20°;(b)～1.5μm for φ=40°,(c)～7μm for φ=60°, and (d)～8μm for φ=70° and rise as the incident angle increase. It is explained that these variations take place during ion sputtering of the bombarded surface.
出处
《杭州大学学报（自然科学版）》
CSCD
1998年第2期58-61,共4页
Journal of Hangzhou University Natural Science Edition
关键词
表面形貌
离子溅射
入射角
surface tapography
ion sputtering
incidence angle
