摘要
介绍了新型微电子器件发展现状和主要技术，分析了微电子器件可靠性技术发展趋势，提出我国半导体器件可靠性技术发展对策和建议。
The current state and main technology of new type microelectronic devices are discussed,and the tendency of reliability technology of microelectronic devices are presented.The Countermeasure for improving reliability technology of semiconductor devices in our country are suggested.
出处
《半导体情报》
1998年第2期1-8,共8页
Semiconductor Information
