摘要
本次实验制备了不同的前驱液,分别利用旋涂法及超声雾化法成功地在SiO2/Si衬底上生长出了Ca3Co4O9热电薄膜。利用XRD检测技术对薄膜样品进行了物相分析,用金相显微分析技术分析了薄膜的表观相貌。实验结果表明,在SiO2/Si衬底生长出的Ca3Co4O9薄膜具有一定的择优取向,雾化法制备的薄膜样品具有较好的表观质量。
In this paper, different precursor solution has been made to preparation Ca3Co4O9 thin film by spin coating technology and ultrasonic spraying. The film samples were analyzed by XRD scattering and metallography microscope. The results show that the Ca3Co4O9 thin film deposited on SiO2/Si substrate has some orientation and the film prepared by ultrasonic spraying has better apparent quality.
出处
《有色金属加工》
CAS
2008年第4期36-39,共4页
Nonferrous Metals Processing
关键词
热电材料
热电薄膜
旋涂法
雾化法
thermoelectric materials, thermoelectric thin film, spin coating, ultrasonic spraying
