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硼硅玻璃薄膜的抛光工艺 被引量:1

Study on Polishing Mechanism of Grinding Film
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摘要 对硼硅玻璃产品的用途及加工表面质量要求进行了分析,以自制抛光机为抛光工具,抛光薄膜为抛光膜,水作为抛光冷却液,通过对大量抛光实验数据的研究,拟定了最优的硼硅玻璃薄膜抛光过程工艺.该工艺不仅可以满足加工要求,而且其冷却液还具有绿色环保作用. The optimization techniques of the polishing process of boron - silicon glass through the research of much polishing experimental data and the analysis of the use of product of boron - silicon glass and the request of the quality of machining surface are studied. In the experiments we use self - made polishing machine as the tool of polishing, use the polishing films as films, and water is used as coolant. This technics not only can satisfy the request of machining, in which the coolant used has the effect of green environmental protection, and it can also make a progress for the manufacture and the application field of boron - silicon glass.
出处 《哈尔滨理工大学学报》 CAS 2007年第1期114-117,共4页 Journal of Harbin University of Science and Technology
基金 黑龙江省自然科学基金项目(E2004-31)
关键词 硼硅玻璃 薄膜抛光 抛光工艺 boron - silicon glass film polishing polishing technics.
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