摘要
采取不同基体性能的固结磨料抛光垫(FAP),在相同的化学机械抛光(CMP)参数下,研究了溶胀率和铅笔硬度等基体性能对K9光学玻璃加工时的材料去除率(MRR)和三维轮廓表面粗糙度(Sa)等加工性能的影响规律。结果表明,溶胀率和铅笔硬度两个基体性能指标共同影响着工件的MRR和表面粗糙度。随着基体溶胀率的增大,工件的MRR降低,而工件的表面粗糙度变大;随着湿态铅笔硬度的增加,工件的MRR也相应增大,而工件的表面粗糙度依据溶胀率的某一值呈现先增大后减小的趋势;同时亲水性FAP能对工件进行长时间持续稳定加工,可说明具有自修整功能。
The relationship between different matrix of fixed abrasive pad（FAP） and the polishing performance of K9 glass is studied under the same chemical mechanical polishing process parameters. Swelling ratio and pencil hardness are selected to evaluate the matrix properties of FAP, and material removal rate （MRR） and 3D-profile surface roughness （Sa） are selected to evaluate machining performance of FAP. The results show that the swelling rate and the pencil hardness of the two substrates together influence the performance of the MRR and surface roughness of the sample. With increasing the swelling rate of matrix, the MRR of sample reduces, and the surface roughness of sample increases; with the increase of wet pencil hardness of the sample, the MRR will also increase accordingly, while the surface roughness of sample based on a value of the swelling rate increases at first and then decreases, and hydrophilic FAP can stand long-time steady processing, which demonstrates the self-conditioning capabilities.
出处
《激光与光电子学进展》
CSCD
北大核心
2011年第1期105-111,共7页
Laser & Optoelectronics Progress
基金
国家自然科学基金(50905086)
江苏省自然科学基金(BK2010512)
南京航空航天大学基本科研业务费专项科研项目(NS2010127)资助课题
关键词
光学制造
固结磨料抛光垫
基体性能
加工性能
自修整
optical fabrication
fixed abrasive pad
matrix properties
process performance
self-conditioning
