摘要
采用ＳＥＭ、Ｒａｍａｎ光谱、ＸＲＤ等测试方法，对直流等离子体射流ＣＶＤ法在硬质合金基体上合成的金刚石膜进行了形貌和结构分析。结果表明，该方法合成的金刚石膜形貌和质量受基体表面上的温度梯度、化学物质（原子氢、碳氢基团等）浓度梯度的影响较大。膜层内存在ＧＰａ数量级的残余压应力，微观应力很小。嵌镶块尺寸为纳米数量级，且随甲烷浓度增高而减小，由此而估算的位错密度统计平均值达１０１０ｃｍ－２数量级。综合ＸＲＤ和Ｒａｍａｎ光谱结果。
The Morphologies and structures of diamond films synthesized on YG8 cemented carbide substrates using DC plasma jet CVD (direct current plasma jet chemical vapor deposition) method have been investigated by means of SEM,XRD and Raman spectroscopy. The results show that the thermal radial gradient and the chemical species concentration gradient on substrate surface have a great influence on the morphology and quality of diamond films.There are residual compressive stresses with GPa order of magnitude in diamond films,and the micro stresses are quite small. The mosaic block size, being nano meter order of magnitude,decreases with increasing the methane concentration.The statistical average value of the dislocation density in the diamond film,being estimated from the magnitude of the sub grain size,is at least 10 10 cm -2 order of magnitude. It has been shown that both the lattice distortion and the FWHM value have a similar trend of change with the methane concentration comparing the results of XRD with the results of Raman.
出处
《功能材料》
EI
CAS
CSCD
北大核心
1997年第1期89-92,共4页
Journal of Functional Materials
关键词
CVD
金刚石膜
薄膜
硬质合金
diamond film,cemented carbide,residual stress,lattice distortion,mosaic block size
