摘要
利用脉冲真空电弧离子镀技术在3Cr13不锈钢基底上制备类金刚石(DLC)薄膜,采用X射线光电子能谱技术分析DLC薄膜中sp3键及sp2键含量和组分.采用显微硬度计测试了薄膜的显微硬度,利用扫描电镜测试了膜的表面形貌.划痕仪测试了薄膜与不锈钢基底的结合强度.结果表明:所镀制的类金刚石薄膜品质优良,类金刚石中sp3键含量较高,sp3/sp2=1.63,具有良好的表面形貌,在不锈钢上沉积DLC膜后明显提高了不锈钢的硬度,Ti过渡层的引入明显的改善了膜与不锈钢之间的结合强度.
Diamond-like carbon （DLC） films are prepared on 3Cr13 stainless steel substrates by pulsed vacuum arc ion deposition. The films structure and the contents of sp^3 ,sp^2 are analyzed by XPS （x-ray photoelectron spectroscopy）. The surface appearance is analyzed by SEM（Scanning electron microscopy）. The interfacial adhesion is investigated on a scratch tester. It has been found that the DLC films have excellent quality,the content of sp^3 is high,sp^3/sp^2= 1.63. Experiments show that the DLC films prepared by pulsed vacuum arc ion deposition have good surface appearance. Moreover,interfacial adhesion is improved remarkably by adding a Ti transition layer between DLC films and stainless.
出处
《西安工业学院学报》
2006年第2期103-106,共4页
Journal of Xi'an Institute of Technology
基金
陕西省重点实验室基金项目(ZSKJ200403)
