摘要
主要讨论了一种微型电磁驱动器的设计和制作工艺。该驱动器结构简单,由 Parylene 振动膜和硅基片两层组成,将驱动线圈与硅片集成在一起。对平面电磁线圈的驱动特性和驱动器振动膜的形变进行了分析,并对其关键尺寸进行优化。采用电镀工艺在硅基片上电镀驱动线圈,在 Parylene 薄膜上电镀 NiFe 合金阵列,采用牺牲层工艺得到振动膜的悬空结构。
Presented the design and fabrication of a micro electromagnetic actuator, which composed of two layers. One layer is a Parylene diaphragm with an electroplated NiFe array, the other layer is a silicon wafer with a coil on it. Analyzed the actuating character of the coil and the Parylene diaphragm, and optimize the dimension of NiFe posts. Electroplating was adopted to fabricate the coil on the silicon and the NiFe array on the Parylene diaphragm, and sacrificial layer technology was employed to release the diaphragm from the silicon wafer.
出处
《仪表技术与传感器》
CSCD
北大核心
2005年第12期10-12,共3页
Instrument Technique and Sensor
基金
教育部博士点基金(20010248001)
