摘要
主要讨论了一种微型电磁驱动器的设计和制作工艺。该驱动器结构简单,由Parylene振动膜和硅基片两层组成,将驱动线圈与硅片集成在一起。分析了平面电磁线圈的驱动特性和驱动器振动膜的形变,对其关键尺寸进行优化。采用电镀工艺在硅基片上电镀驱动线圈、在Parylene薄膜上电镀NiFe合金阵列,并采用牺牲层工艺得到振动膜的悬空结构。
The design and fabrication of a two-layer micro electromagnetic actuator is presented in the paper. One layer of the actuator is a Parylene diaphragm with an electroplated NiFe array, the other layer is a silicon wafer with a coil on it. The actuating characters of the coil and the parylene diaphragm are analyzed and the dimensions of NiFe posts optimized. Electroplating is adopted to fabricate the coil on the silicon and the NiFe array on the Parylene diaphragm. The sacrificial layer technology is employed to release the diaphragm from the silicon wafer.
出处
《机械制造》
北大核心
2004年第12期25-28,共4页
Machinery
基金
教育部博士点基金资助项目(编号:20010248001)
