摘要
采用激光微细熔覆柔性直写技术在陶瓷基板上制备厚膜电阻。该技术的优点是精度高、速度快、不需要制作掩模板等。大量研究结果表明,搭接量的改变对电阻的组织性能影响很大,而组织性能对最终整个器件的质量起决定作用。因此,获得最佳搭接量制备出性能优良的电阻元件成为重要的研究课题。针对陶瓷基板,系统地研究了搭接量对厚膜电阻的组织性能的影响规律,获得了形成电阻膜的最佳搭接量为单道扫描光斑直径的3/5,并对影响组织性能的主要机理进行了分析。
A novel technique of laser micro cladding is used to flexibly and directly fabricate thick film resistors on ceramic substrate. The technique has the advantages of high accuracy, rapid speed and no mask etc.. A lot of research results show that change of overlapped spaces has an acute effect on structure and property of thick-film resistors which have a decisive action to ultimate quality of the resistor components. For the ceramic substrates, the relationship of overlapped spaces to structure and property of thick film resistors is systemically studied, and shows that the optimal distance between centers of overlapped lines should be 3/5 width of single line scanned by laser. Moreover, the main mechanism about effect of overlapped spaces on change of structure and property is also studied.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2005年第11期1554-1560,共7页
Chinese Journal of Lasers
基金
国家863计划(2001AA421290)
国家自然科学基金(50075030)资助项目
关键词
激光技术
搭接量
激光微细熔覆
柔性直写
厚膜电阻
laser technique, overlapped space
laser micro cladding, flexible direct fabrication
thick-film resistor
