摘要
介绍了玻璃基板上激光微细熔覆柔性直写电阻的基本原理及其工艺,系统地研究了各工艺参数的变化对电阻阻值的影响规律。通过热作用、激光与物质的相互作用原理理论分析了电阻膜的形成以及组织、结构、性能间的关系,确立了制备电阻的最佳工艺参数和获得高精度、小误差电阻阻值测试的最佳方法。结果表明,采用该技术可以在无掩膜下通过调节电阻的形状、大小、体积以及激光加工参数,一步完成所需高精度、高质量、高性能电阻元件的制备和修复,不需要电阻的微调,工艺简单、灵活、速度快、成本低,具有广阔的应用前景。
Basic principle and technologies of direct fabrication of resistor on glass structure by micro-fine cladding were introduced in this paper. The effect of technologic parameters on resistance values was systemically studied. Based on the thermal analysis and interacting principle between laser and matters, formation of resistance films and relation between structure and properties were theoretically analyzed. The optimal technologic parameters about direct writing resistance and the optimal testing method of high-precision and small-error resistance values were obtained. The results demonstrated that laser micro-fine cladding method by one-step can realize fabrication and repair of high-quality, high-precision and high-property resistance components without mask in virtue of shape, size and volume of resistance and laser processing parameters adjusted, and need not to trim resistances. With the simple and flexible technology, rapid velocity and low cost, the technique is possessed of wide applied prospect.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2005年第2期281-286,共6页
Chinese Journal of Lasers
基金
国家863计划(2001AA421290)
国家自然科学基金(50075030)资助项目
关键词
激光技术
激光微细熔覆
柔性直写
电阻
Carbon dioxide lasers
Cladding (coating)
Electric resistance measurement
Microstructure
Process control
Resistors
Thermal effects
