摘要
研究用金属铟(纯度99．99％)和锡酸钠为原料制备In2O3·Sn2(ITO)复合粉末的工艺过程。在In3+浓度150g／L,(NH4)CO3浓度200g／L,沉淀温度323-343K,滴速1drop／s,pH=6-7,强力搅拌,烘干温度353-373K,焙烧温度973-1173K等适宜条件下制备出ITO超细复合粉末。产品平均粒径0．05μm左右,颗粒为球形,分布较均匀,流动性好,适于制备高密度的ITO靶材。
The technology for ITO composite powders preparation by the liquid precipitation process with the indium （with purity of 99.99 %） and sodium stanate as the raw materials is investigated. The uhrafine powder of ITO is prepared under the optimal condition of 150g/L In^3＋ in solution, concentration of precipitant 200g/L with pH=6 and adding rate of ldrop/s, strong stirring, reaction temperature 323-343K, roasting temperature 973-1173K. The spherical powder product is obtained with particle size about 0.05μm and well-distributed, excel-lent flowahilily and suitable for preparation of ITO target material with high density.
出处
《有色金属》
CSCD
北大核心
2005年第3期24-27,共4页
Nonferrous Metals
关键词
材料合成与加工工艺
ITO
液相共沉淀法
超细粉末
material synthetic and processing technology ITO liquid precipitation ultrafine powder
