摘要
铟锡氧化物(ITO)纳米粉体具有粒径小、比表面积大、分散性好、杂质少的特点,是制备性能良好的ITO薄膜的原料。本文介绍了目前ITO纳米粉体的制备方法如:喷雾燃烧法、溶胶-凝胶法、水热合成法、化学液相共沉淀法、喷雾热解法、电解法和机械研磨法、燃烧合成法等,分析了不同制备方法的原理、优缺点及团聚的原因,提出了解决ITO粉体制备中团聚的方法,并对ITO纳米粉体制备的研究进行了展望。
The Indium Tin Oxide nanometer powder with small particle size , super specific surface area , good dispersion performance and less impurity is the material to produce good performance ITO thin film. In this paper, the methods of preparation of ITO nano-powder are introduced at present, such as atomizing-combustion method, sol-gel technique, hydrothermal method, coprecipitation method etc are summarized. Different preparation methods, advantages and disadvantages and the cause of the reunion are analyzed, the solution to the problem of reunion during the ITO powder preparation is put forward and the preparation research of ITO powder is prospected.
出处
《粉末冶金技术》
CAS
CSCD
北大核心
2014年第4期290-295,共6页
Powder Metallurgy Technology
关键词
ITO纳米粉体
制备方法
团聚
分散
ITO nano-powder, preparation method, agglomeration, dispersion
