摘要
叙述了次条纹积分干涉计量的原理，仅用一幅光载频干涉条纹图获取全部位相信息。先用分段积分法求出条纹初始位相，再由最小二乘原理，迭代出信息的位相解。并讨论了条纹位相的算法，误差修正和测量面形的应用。
We describe a subfringe integration interferometry for which the phase information is evaluated only from one interferogram. The initial phases are obtained by subfringe integration method, then the precision iteration to estimate the phase can be developed from the principle of least--squares estimation. In addition, the phase--extraction algorithm, error correction and some spplications to the measurement of the surface shape are discussed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第12期1613-1616,共4页
Acta Optica Sinica
基金
国家教委留学回国科研基金
关键词
位相测量
次条纹积分
干涉仪
phase measurement, subfringe integration, interferometer.
