摘要
介绍一种应用电光晶体补偿位相测量微小位移的方法,着重分析其测量精度,并应用这种方法校正压电陶瓷的线性,精度优于1%波长。
A small displacement measuring method of electro-optic crystal compensating phases is described,with the emphasis on the analysis of its measurement accuracy.The method is used to correct the linearity of piezo-electric ceramics, its accuracy is better than 1% of wavelength.
出处
《应用光学》
CAS
CSCD
1993年第4期45-47,共3页
Journal of Applied Optics
关键词
电光晶体
压电陶瓷
位移观测
补偿
electro-optic crystal
phase compensation
piezoelectric ceramic linearity correction
