摘要
介绍研制成的一台移相式数字平面干涉仪，其孔径为Φ２４５ｍｍ，用液面作基准标定并消除仪器的系统误差，准确度优于λ／５０（峰谷值，λ＝０．６３２８μｍ）。利用计算机辅助干涉术，被测件口径可扩展到Φ５００ｍｍ。该仪器将用于建立高精度、大孔径平面波像差标准。文中阐述了光学干涉仪、移相器及精度校核等问题。
This paper describes a large aperture-high accuracy phase shifting digital flat interferometer which is a combination of optics,mechanics,electricity and algorithm.Its aperture is 245 mm and liquid surface is used as absolute flat to eliminate systemic error.The accuracy is better than λ/50 (λ= 0. 6328 μm peak-to-valley value). The tested aperture can be enlarged to 500 mm.This interferometer will be used as an optical flat standard instrument.The optical interfermeter,phase shifter and calibration of precision are discussed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第4期480-485,共6页
Acta Optica Sinica
基金
国防科工委专项科研基金
关键词
移相式
数字平面干涉
平面波像差标准
interferometer,phase shifting technique, optical flat,standard,calibration of precision.
