摘要
发射尖是液态金属离子源的关键部件之一,其性能的优劣直接影响到整个离子源的工作稳定性。本文通过对源尖腐蚀的多次实验,开发了一套发射尖腐蚀装置,该装置可以对发射尖插入腐蚀液的深度加以控制,并能在腐蚀完成后自动切断回路电流,实现了发射尖腐蚀工艺的重复性和可靠性,从而为液态金属离子源以及聚焦离子束系统的研制开发提供了一个有效的辅助工具。
Emit needle is one of the key parts of liquid metal ion source, the working stability of ion source is affected directly by its character. We developed a set of device for the eroding of emit needle by lots of eroding experiments. The device can control depth of emit needle in the eroding liquor and shut off circuit automatically when the eroding experiment is finished. Thus, eroding technics of emit needle can be repeated and has high reliability. So an effective assistant tool for developing liquid metal ion source and the system of focused ion beam is offered.
出处
《微纳电子技术》
CAS
2005年第3期142-144,共3页
Micronanoelectronic Technology
关键词
聚焦离子束
液态金属离子源
发射尖
focused ion beam
liquid metal ion source (LMIS)
emit needle
