摘要
设计了一种聚焦离子束系统用液态金属离子源(Liquid Metal lon Source-LMIS),本文对该源组件结构的设计、发射针尖的腐蚀工艺、挂金属镓工艺、测试系统的设计作了介绍;然后对该离子源的I-V特性、角电流密度、稳定性以及寿命等性能进行了测试。实验结果表明,该源的各项指标均达到了聚焦离子束系统的要求,并对影响源性能的因素进行了分析,从而为合理有效地设计液态金属离子源提供启示。
A novel type of liquid metal ion source（ LMIS） has been successfully developed for the focused ion beam. Technological discussions focused on its structural design, the electrochemical etching of the tungsten tips, gallium wetting of the tip and the measurement setup of its field ion emission characteristics.The current-voltage（I-V） characteristics, angular ion current density distributions, its stability and its lifetime, were experimentally evaluated. The influence of various factors on emission properties of the LMIS was tentatively analyzed to further improve its design. The results show that the newly-developed LMIS meets all the stringent requirements of the focused ion beam system.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2008年第4期331-336,共6页
Chinese Journal of Vacuum Science and Technology
关键词
聚焦离子束
液态金属离子源
测试系统
发射特性
Focused ion beam
Liquid metal ion source
Testing system
Emitting performance
