摘要
本文叙述了液态金属镓离子源的制做方法和特性研究。提出了一种可用于同轴发射组件中长钨丝针尖的新的挂镓工艺,该工艺在挂镓的同时还可检验挂镓效果的好坏。所研制源已成功地用于扫描离子显微镜,并获得亚微米分辨率;其工作寿命长达300多小时,尚可更生,继续使用。
In this paper, we have described the manufacturing method of liquid metal Ga ion source(LMIS) and its properties.A new Ga-wetting method suitable to long W wire is proposed. The wetting effect can be checked simultaneously to en-sure good wetting. The LMIS wetted by this method have been assembled in our scanning ion microscope (SIM). The re-solution of this SIM reached submicron. The life of our LMIS is longer than 300 hours. By adding a few drops of liquidGa into the LMIS,the source is renewed and can work again.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第4期233-237,共5页
Chinese Journal of Vacuum Science and Technology
