摘要
介绍了一种新型的集成反熔丝和光敏二极管的微流体测量芯片的设计。将反熔丝发光二极管及光敏接收二极管集成到微流体装置可以通过结合集成电路技术和微加工技术来实现。这种新型的微流体芯片包括一个光敏二极管探测器,硅微通道和一个纳米级的反熔丝发光二极管。还介绍了反熔丝发光二极管的结构及工作原理、芯片的结构和制作方法、芯片的应用及其应用仿真。该芯片结合外流路装置可以检测流体的流速、通道中流体的吸收率、通道中流体在某介质中的折射参数以及液体中的气泡、微粒等。
LED antifuses and photodiode detector were integrated into a microfluidic chip that is realized with extended standard IC-compatible technology and micromachining technology. The chip comprises a microchannel sandwiched between a nanometre-scale diode antifuse light emitter and a photodiode detector. In this paper,the working principle and properties of antifuse,the chips structure and fabrication process,the possible applications and emulation are discussed. The chips potential applications comprise electro-osmotic flow speed measurement,detection of absorptivity of liquids in the channel,detection of changes of the refractive index of the medium in the channel,e.g. air bubbles,particles in the liquid.
出处
《微纳电子技术》
CAS
2005年第2期62-65,共4页
Micronanoelectronic Technology
