摘要
简要回顾了用于生物医学领域的微型机电系统 (生物微机电系统 :BioMEMS)的发展历程 ,侧重介绍了其目前的主要研究状况 ,对用于实现BioMEMS的主要共性关键技术进行了分析。同时 ,对BioMEMS的应用前景也进行了讨论 ,认为BioMEMS在生命科学、医学等领域中必将获得巨大的应用 。
A brief review of the micro electron mechanical systems(MEMS) which are considered to be used in biomedical engineering (so called BioMEMS) is given. The main research and development of BioMEMS, involving the common key techniques for realization of the related micro systems, are also presented and discussed. Future applications of BioMEMS are great, and will push forward the research and development of life science and biomedical engineering with higher speed.
出处
《航天医学与医学工程》
CAS
CSCD
北大核心
2001年第3期221-224,共4页
Space Medicine & Medical Engineering
基金
教育部优秀青年教师科研奖励基金(1999)
教育部基金资助
南京留学回国人员启动基金资助
关键词
微机电系统
生物医学工程
微细加工
micro electro mechanical system(Bio MEMS)
biomedical engineering
micro fabrication
