The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing paramet...The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing parameters such as the substrate axial position, different coupling coils and inserted resistance are experimentally studied. To get a better understanding of the experimental results, the axial distributions of the plasma density, electron temperature and plasma potential are measured with an rf compensated Langmuir probe; the coil rf peak-to-peak voltage is measured with a high voltage probe. As in the case of changing discharge power, it is found that continuity, instability and bi-stability of the tuned substrate bias can be obtained by means of changing the substrate axial position in the plasma source or the inserted resistance. Additionally, continuity can not transit directly into bi-stability, but evolves via instability. The inductance of the coupling coil has a substantial effect on the magnitude and the property of the tuned substrate bias.展开更多
The dynamic performance of the coupling shaft system in a carpet tufting machine is the most critical factor affecting the carpet tufting machine's efficiency,and the product quality of the tufted carpet. To deter...The dynamic performance of the coupling shaft system in a carpet tufting machine is the most critical factor affecting the carpet tufting machine's efficiency,and the product quality of the tufted carpet. To determine how to avoid resonance produced by the coupling shaft system's vibration during the weaving process,the dynamic performance of a coupling shaft system in a carpet tufting machine was analyzed. Focusing on a DHGN801D-400 carpet tufting machine,a dynamic model of coupling shaft system was established by utilizing transfer matrix methodology. On the basis of this model,the natural frequencies and mode shapes of the coupling shaft system were obtained through simulations. The correctness of the theoretical model and the dynamic performance of the coupling shaft system were validated by experiments. The first order natural frequency of the coupling shaft system was close to 600 r / min. A conclusion can thus be drawn that operating the carpet tufting machine near this speed should be avoided as much as possible.展开更多
基金National Natural Science Foundation of China (No 10175014)
文摘The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing parameters such as the substrate axial position, different coupling coils and inserted resistance are experimentally studied. To get a better understanding of the experimental results, the axial distributions of the plasma density, electron temperature and plasma potential are measured with an rf compensated Langmuir probe; the coil rf peak-to-peak voltage is measured with a high voltage probe. As in the case of changing discharge power, it is found that continuity, instability and bi-stability of the tuned substrate bias can be obtained by means of changing the substrate axial position in the plasma source or the inserted resistance. Additionally, continuity can not transit directly into bi-stability, but evolves via instability. The inductance of the coupling coil has a substantial effect on the magnitude and the property of the tuned substrate bias.
基金National Natural Science Foundation of China(No.51175075)the Research and Innovation Project of Shanghai Municipal Education Commission,China(No.15ZZ034)
文摘The dynamic performance of the coupling shaft system in a carpet tufting machine is the most critical factor affecting the carpet tufting machine's efficiency,and the product quality of the tufted carpet. To determine how to avoid resonance produced by the coupling shaft system's vibration during the weaving process,the dynamic performance of a coupling shaft system in a carpet tufting machine was analyzed. Focusing on a DHGN801D-400 carpet tufting machine,a dynamic model of coupling shaft system was established by utilizing transfer matrix methodology. On the basis of this model,the natural frequencies and mode shapes of the coupling shaft system were obtained through simulations. The correctness of the theoretical model and the dynamic performance of the coupling shaft system were validated by experiments. The first order natural frequency of the coupling shaft system was close to 600 r / min. A conclusion can thus be drawn that operating the carpet tufting machine near this speed should be avoided as much as possible.
