This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, w...This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum展开更多
In order to improve the high-temperature deformation resistance and creep resistance of TiAl-based alloys,cold crucible directional solidification(CCDS)technology was employed.Aβ-type TiAl-based alloy with the nomina...In order to improve the high-temperature deformation resistance and creep resistance of TiAl-based alloys,cold crucible directional solidification(CCDS)technology was employed.Aβ-type TiAl-based alloy with the nominal composition of Ti44Al6Nb1Cr2V was prepared using the optimized CCDS parameters of 45 kW input power and 0.5 mm·min^-1 solidification rate.Thermo-compression testing was utilized to evaluate the hightemperature deformation resistance and creep resistance of the CCDS Ti44Al6Nb1Cr2V alloy.Results show that the CCDS Ti44Al6Nb1Cr2V alloy billets contain aligned columnar grains and a high percentage of small-angle lamellae.Thermo-compression testing results in the radial direction of the CCDS alloy show a much higher peak stress than other reported results in similar conditions.The much higher hardening exponent and deformation activation energy are obtained,corresponding to the excellent high-temperature deformation resistance and creep resistance,which are because of the hard-oriented grains,weaker stress-strain coordination capability of lamella structure and relatively more hysteretic dynamic recrystallization.Thermo-compression testing results in the longitudinal direction of the CCDS Ti44Al6Nb1Cr2V alloy show the much higher peak stress than that in the radial direction,indicating the better high-temperature deformation resistance and creep resistance attributed to the hard-oriented lamellae in this condition.展开更多
文摘This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum
基金the National Natural Science Foundation of China(Grant Nos.51825401 and 51601034)the Fundamental Research Funds for the Central Universities(Grant No.N180904005).
文摘In order to improve the high-temperature deformation resistance and creep resistance of TiAl-based alloys,cold crucible directional solidification(CCDS)technology was employed.Aβ-type TiAl-based alloy with the nominal composition of Ti44Al6Nb1Cr2V was prepared using the optimized CCDS parameters of 45 kW input power and 0.5 mm·min^-1 solidification rate.Thermo-compression testing was utilized to evaluate the hightemperature deformation resistance and creep resistance of the CCDS Ti44Al6Nb1Cr2V alloy.Results show that the CCDS Ti44Al6Nb1Cr2V alloy billets contain aligned columnar grains and a high percentage of small-angle lamellae.Thermo-compression testing results in the radial direction of the CCDS alloy show a much higher peak stress than other reported results in similar conditions.The much higher hardening exponent and deformation activation energy are obtained,corresponding to the excellent high-temperature deformation resistance and creep resistance,which are because of the hard-oriented grains,weaker stress-strain coordination capability of lamella structure and relatively more hysteretic dynamic recrystallization.Thermo-compression testing results in the longitudinal direction of the CCDS Ti44Al6Nb1Cr2V alloy show the much higher peak stress than that in the radial direction,indicating the better high-temperature deformation resistance and creep resistance attributed to the hard-oriented lamellae in this condition.
