将聚焦离子束和扫描电子显微镜相整合而形成的双束系统——聚焦离子束扫描电子显微镜(Focused Ion Beam-Scanning Electron Microscopy,FIB-SEM)已成为对生物样品的超微结构进行成像和定量分析的有力工具。该系统既能对硬质生物材料进...将聚焦离子束和扫描电子显微镜相整合而形成的双束系统——聚焦离子束扫描电子显微镜(Focused Ion Beam-Scanning Electron Microscopy,FIB-SEM)已成为对生物样品的超微结构进行成像和定量分析的有力工具。该系统既能对硬质生物材料进行铣削,又能在纳米尺度完成对其三维结构的重建。更为重要的是,它还能将组织或器官的宏观形态与组成细胞的内部结构直接关联。本文介绍了FIB-SEM的工作原理和设备组成,对FIB-SEM三维成像在肿瘤及肿瘤干细胞模型、生物打印系统的铣削、成像和超微结构分析,以及癌细胞对纳米颗粒的摄入等肿瘤生物学领域的典型应用进行了概述,并对利用FIB-SEM三维定量和超微结构分析的方法研究线粒体和其他亚细胞结构与癌症发生的关系提出了展望。目的是强化FIB-SEM在肿瘤生物学领域的应用,以揭示肿瘤细胞超微形态和结构变化对肿瘤演进所起的作用,为肿瘤治疗提供新靶标。展开更多
In this work,a focused ion beam(FIB)-scanning electron microscopy(SEM) dual beam system was successfully built by integrating a FIB column and a graphics generator onto a SEM.Real-time observation can be realized by S...In this work,a focused ion beam(FIB)-scanning electron microscopy(SEM) dual beam system was successfully built by integrating a FIB column and a graphics generator onto a SEM.Real-time observation can be realized by SEM during the process of FIB milling.All kinds of graphics at nanoscale regime,such as lines,characters,and pictures,were achieved under the control of graphics generator.Moreover,the FIB milling line width can be reduced nearly 27% by the introduction of simultaneous electron beam,and a line width as small as 10 nm was achieved.The numerical analysis indicates that the significant improvement on line width is induced by the Coulomb interaction between the electrons and ions.展开更多
FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷...FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷检测中的常见应用,如盲孔孔底分析、杂物失效分析和晶体结构分析。展开更多
Dual harmonic systems have been widely used in high intensity proton synchrotrons to suppress the space charge effect, as well as reduce the beam loss. To investigate the longitudinal beam dynamics in a dual rf system...Dual harmonic systems have been widely used in high intensity proton synchrotrons to suppress the space charge effect, as well as reduce the beam loss. To investigate the longitudinal beam dynamics in a dual rf system, the potential well, the sub-buckets in the bunch and the multi-solutions of the phase equation are studied theoretically in this paper. Based on these theoretical studies, optimization of bunching factor and rf voltage waveform are made for the dual harmonic rf system in the upgrade phase of the China Spallation Neutron Source Rapid Cycling Synchrotron （CSNS/RCS）. In the optimization process, the simulation with space charge effect is done using a newly developed code. C-SCSIM.展开更多
文摘将聚焦离子束和扫描电子显微镜相整合而形成的双束系统——聚焦离子束扫描电子显微镜(Focused Ion Beam-Scanning Electron Microscopy,FIB-SEM)已成为对生物样品的超微结构进行成像和定量分析的有力工具。该系统既能对硬质生物材料进行铣削,又能在纳米尺度完成对其三维结构的重建。更为重要的是,它还能将组织或器官的宏观形态与组成细胞的内部结构直接关联。本文介绍了FIB-SEM的工作原理和设备组成,对FIB-SEM三维成像在肿瘤及肿瘤干细胞模型、生物打印系统的铣削、成像和超微结构分析,以及癌细胞对纳米颗粒的摄入等肿瘤生物学领域的典型应用进行了概述,并对利用FIB-SEM三维定量和超微结构分析的方法研究线粒体和其他亚细胞结构与癌症发生的关系提出了展望。目的是强化FIB-SEM在肿瘤生物学领域的应用,以揭示肿瘤细胞超微形态和结构变化对肿瘤演进所起的作用,为肿瘤治疗提供新靶标。
基金supported by the National Natural Science Foundation of China (Grant No. 50971011)Beijing Natural Science Foundation (Grant No. 1102025)+1 种基金Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20091102110038)the Fundamental Research Funds for the Central Universities (Grant No. 11174023)
文摘In this work,a focused ion beam(FIB)-scanning electron microscopy(SEM) dual beam system was successfully built by integrating a FIB column and a graphics generator onto a SEM.Real-time observation can be realized by SEM during the process of FIB milling.All kinds of graphics at nanoscale regime,such as lines,characters,and pictures,were achieved under the control of graphics generator.Moreover,the FIB milling line width can be reduced nearly 27% by the introduction of simultaneous electron beam,and a line width as small as 10 nm was achieved.The numerical analysis indicates that the significant improvement on line width is induced by the Coulomb interaction between the electrons and ions.
文摘FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷检测中的常见应用,如盲孔孔底分析、杂物失效分析和晶体结构分析。
基金Supported by National Natural Science Foundation of China(11175193)
文摘Dual harmonic systems have been widely used in high intensity proton synchrotrons to suppress the space charge effect, as well as reduce the beam loss. To investigate the longitudinal beam dynamics in a dual rf system, the potential well, the sub-buckets in the bunch and the multi-solutions of the phase equation are studied theoretically in this paper. Based on these theoretical studies, optimization of bunching factor and rf voltage waveform are made for the dual harmonic rf system in the upgrade phase of the China Spallation Neutron Source Rapid Cycling Synchrotron （CSNS/RCS）. In the optimization process, the simulation with space charge effect is done using a newly developed code. C-SCSIM.
