Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt coated Si (100) substrates by sol-gel techniques with molar ratio of (Ba+Sr) to Ti changing from 0.76 to 1.33. The effect of (Ba+Sr)/Ti ratio deviating from the st...Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt coated Si (100) substrates by sol-gel techniques with molar ratio of (Ba+Sr) to Ti changing from 0.76 to 1.33. The effect of (Ba+Sr)/Ti ratio deviating from the stoichiometry on microstructure, grain growth, dielectric and tunable properties of BST thin films were investigated. TiO2 and (Ba,Sr)2TiO4 were found as a second phase at the ratios of 0.76 and 1.33, respectively. The variation of the ratio reveals more significant effect on the grain size in B-site rich samples than that in A-site rich samples. The dissipation factor decreases rapidly from 0.1 to 0.01 at 1 MHz with decreasing (Ba+Sr)/Ti ratio. The tunability increases with decreasing ratio from 1.33 to 1.05, and then decreases with decreasing ratio from 1.05 to 0.76. The film with (Ba+Sr)/Ti ratio of 1.05 has a maximum tunability of 32% and a dissipation factor of 0.03 at 1 MHz.展开更多
Highly(100)-oriented Ba0.8Sr0.2TiO3/LaNiO3 multilayer films have been prepared on different substrates by chemical solution deposition.The microstructure,interface,thickness and morphologies were characterized by XRD,...Highly(100)-oriented Ba0.8Sr0.2TiO3/LaNiO3 multilayer films have been prepared on different substrates by chemical solution deposition.The microstructure,interface,thickness and morphologies were characterized by XRD,FESEM and AFM techniques,respectively.The results reveal that the multilayer films display satisfied microstructure,clear interface,smooth surface and dense structure,especially,the orientation factor of the 4-period multilayer films can be 0.92 from XRD data and the thickness is about 500nm.The annealing processing plays an important role on the ferroelectric property of highly(100)-oriented multilayer films.展开更多
基金Project (50332030) supported by the National Natural Science Foundation of China
文摘Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt coated Si (100) substrates by sol-gel techniques with molar ratio of (Ba+Sr) to Ti changing from 0.76 to 1.33. The effect of (Ba+Sr)/Ti ratio deviating from the stoichiometry on microstructure, grain growth, dielectric and tunable properties of BST thin films were investigated. TiO2 and (Ba,Sr)2TiO4 were found as a second phase at the ratios of 0.76 and 1.33, respectively. The variation of the ratio reveals more significant effect on the grain size in B-site rich samples than that in A-site rich samples. The dissipation factor decreases rapidly from 0.1 to 0.01 at 1 MHz with decreasing (Ba+Sr)/Ti ratio. The tunability increases with decreasing ratio from 1.33 to 1.05, and then decreases with decreasing ratio from 1.05 to 0.76. The film with (Ba+Sr)/Ti ratio of 1.05 has a maximum tunability of 32% and a dissipation factor of 0.03 at 1 MHz.
文摘Highly(100)-oriented Ba0.8Sr0.2TiO3/LaNiO3 multilayer films have been prepared on different substrates by chemical solution deposition.The microstructure,interface,thickness and morphologies were characterized by XRD,FESEM and AFM techniques,respectively.The results reveal that the multilayer films display satisfied microstructure,clear interface,smooth surface and dense structure,especially,the orientation factor of the 4-period multilayer films can be 0.92 from XRD data and the thickness is about 500nm.The annealing processing plays an important role on the ferroelectric property of highly(100)-oriented multilayer films.
