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(Ba_(0.5)Sr_(0.5))TiO_3铁电薄膜的制备工艺及电学性质研究 被引量:5

(Ba_(0.5)Sr_(0.5))TiO_3 THIN FILM'S PREPARATION AND IT'S ELECTRIC CHARACTERISTICS
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摘要 采用溶胶 凝胶方法制备出纯立方钙钛矿相、介电性能和漏电流特性良好的 (Ba0 .5Sr0 .5)TiO3 铁电薄膜 .研究发现 ,随着烧结温度的升高 ,(Ba0 .5Sr0 .5)TiO3 薄膜纯度和结晶度增高 ,介电常数提高 ,漏电流密度降低 .在 75 0℃进行保温 1h热处理的薄膜性能较好且稳定 :在室温下测得薄膜介电常数为 2 5 0 ,介电损耗为 0 .0 30 ,漏电流密度为 6 .9× 10 -8A/cm2 .较高的介电常数、较低的漏电流密度可能源于良好的纯度和结晶度 .进一步研究表明 ,薄膜导电遵从空间电荷限制电流机制 . (Ba0.5Sr0.5)TiO3 ferroelectric thin films with pure perovskite structure and good dielectric and insulating properties were prepared by Sol-Gel processing. It was found that the purity and crystallinity and dielectric constant of (Ba0.5Sr0.5)TiO3 ferroelectric thin films increased and the leakage current density decreased with the increase of temperature. Films treated at 750degreesC for 1 h showed good and stable properties with a dielectric constant of 250 and a dielectric loss of 0.030 and a leakage current density of 6.9 x 10(-8) A/cm(2). The high dielectric constant, low dielectric loss and leakage current density may originate from the good Purity and crystallinity of the films. The J-U characteristics of films indicated that the conduction of the films obeyed the mechanism of the space-charge-limited injection model.
出处 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2003年第1期71-74,共4页 Journal of Infrared and Millimeter Waves
关键词 (Ba0.5Sr0.5)TiO3 铁电薄膜 制备工艺 电学性质 溶胶-凝胶法 介电性能 漏电流密度 钛酸锶钡 SOL-GEL Ba0.5Sr0.5TiO3 thin film dielectric property leakage current density
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参考文献1

  • 1ZHONG Wei-Lie钟维烈.Ferroelectric Physics铁电体物理学[M].Beijing: Science Press北京:北京出版社,1996.. 被引量:1

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