摘要
采用溶胶 凝胶方法制备出纯立方钙钛矿相、介电性能和漏电流特性良好的 (Ba0 .5Sr0 .5)TiO3 铁电薄膜 .研究发现 ,随着烧结温度的升高 ,(Ba0 .5Sr0 .5)TiO3 薄膜纯度和结晶度增高 ,介电常数提高 ,漏电流密度降低 .在 75 0℃进行保温 1h热处理的薄膜性能较好且稳定 :在室温下测得薄膜介电常数为 2 5 0 ,介电损耗为 0 .0 30 ,漏电流密度为 6 .9× 10 -8A/cm2 .较高的介电常数、较低的漏电流密度可能源于良好的纯度和结晶度 .进一步研究表明 ,薄膜导电遵从空间电荷限制电流机制 .
(Ba0.5Sr0.5)TiO3 ferroelectric thin films with pure perovskite structure and good dielectric and insulating properties were prepared by Sol-Gel processing. It was found that the purity and crystallinity and dielectric constant of (Ba0.5Sr0.5)TiO3 ferroelectric thin films increased and the leakage current density decreased with the increase of temperature. Films treated at 750degreesC for 1 h showed good and stable properties with a dielectric constant of 250 and a dielectric loss of 0.030 and a leakage current density of 6.9 x 10(-8) A/cm(2). The high dielectric constant, low dielectric loss and leakage current density may originate from the good Purity and crystallinity of the films. The J-U characteristics of films indicated that the conduction of the films obeyed the mechanism of the space-charge-limited injection model.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第1期71-74,共4页
Journal of Infrared and Millimeter Waves