Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse i...Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse image of the microchannel to a PMMA plate by using hot embossing methods. The silicon master is electrostatically bonded to a Pyrex 7740 glass wafer, which improves the device yield from about 20 devices to hundreds of devices per master. Effects of embossing temperature, pressure and time on the accuracy of replication are systematically studied using the orthogonal factorial design. According to the suggested experimental model, the time for the whole embossing procedure is shorten from about 20 min to 6 min, and the accuracy of replication is 99.3%. The reproducibility of the hot embossing method is evaluated using 10 channels on different microfluidic devices, with variations of 1.4 % in depth and 1.8% in width.展开更多
In this paper,experiments of one-dimensional plane plate impact on polymethylmethacrylate（PMMA） targets are conducted,in which dynamic transverse stresses induced in the targets are measured using a new type of mang...In this paper,experiments of one-dimensional plane plate impact on polymethylmethacrylate（PMMA） targets are conducted,in which dynamic transverse stresses induced in the targets are measured using a new type of manganin piezoresistive stress gauge having 50 Ω low-pressure narrow grid-like foil.It is shown that this new instrument can improve measurement accuracy remarkably by reducing the so-called strain effect.Moreover,relationship between shear stress and longitudinal stress within a certain range of the latter is obtained.展开更多
基金This project is supported by National Natural Science Foundation of China (No.50135040)National Hi-tech Research and Development Program of China(863 Program, No.2002AA404460).
文摘Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse image of the microchannel to a PMMA plate by using hot embossing methods. The silicon master is electrostatically bonded to a Pyrex 7740 glass wafer, which improves the device yield from about 20 devices to hundreds of devices per master. Effects of embossing temperature, pressure and time on the accuracy of replication are systematically studied using the orthogonal factorial design. According to the suggested experimental model, the time for the whole embossing procedure is shorten from about 20 min to 6 min, and the accuracy of replication is 99.3%. The reproducibility of the hot embossing method is evaluated using 10 channels on different microfluidic devices, with variations of 1.4 % in depth and 1.8% in width.
基金Sponsored by the National Natural Science of China(10872035)
文摘In this paper,experiments of one-dimensional plane plate impact on polymethylmethacrylate（PMMA） targets are conducted,in which dynamic transverse stresses induced in the targets are measured using a new type of manganin piezoresistive stress gauge having 50 Ω low-pressure narrow grid-like foil.It is shown that this new instrument can improve measurement accuracy remarkably by reducing the so-called strain effect.Moreover,relationship between shear stress and longitudinal stress within a certain range of the latter is obtained.
