摘要
离子能量是影响脉冲真空电弧离子镀镀膜质量的一个重要参数,因而测量真空电弧中离子的能量非常重要。本文介绍了一种测量脉冲真空电弧离子能量的装置—五栅网,分析了其测量离子能量的原理,并用它测量了脉冲真空电弧的离子能量。
Ion energy is an important parameter influencing the quality of films by pulsed vacuum arc ion deposition, so it is very necessary to measure the ion energy of pulsed arc. In this paper, a device called five-bar-net, used to measure ion energy of pulsed vacuum arc, was introduced, its measuring principle were presented, and the ion energy of pulsed vacuum arc was measured.
出处
《真空电子技术》
2004年第2期52-54,共3页
Vacuum Electronics
