摘要
利用平行马赫探针和单探针对金刚石镀膜装置中的等离子体漂移速度、离子密度及电子温度进行了测量 ,采用 Chung Kyu- Sun理论对平行马赫探针数据进行分析得到的马赫数为0 .2 8,电子温度为 5 e V,等离子体流速约为 980 m· s-1。单探针测得离子密度在 10 18～ 10 2 0 m-3的范围内 ,电子温度在 2～ 8e V的范围内。
The plasma drift velocity,the ion density and the electron temperature are measured by using parallel Mach probe and single probe in a diamond coating device.The theory of Chung Kyu Sun is used to analyze the data of parallel Mach probe,and Mach number of 0.28,electron temperature of 5eV and plasma drift velocity of 980m·s -1 are obtained.The results measured by single probe are ion density of 10 18 ～10 20 m -3 and electron temperature of 2～8eV.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2000年第3期189-192,共4页
Nuclear Fusion and Plasma Physics
关键词
等离子体漂移速度
电子温度
金刚石镀膜装置
Single probe
Parallel Mach probe
Mach number
Plasma drift velocity
Electron temperature
Ion density
