摘要
介绍了一种大尺寸、无导轨激光干涉精密测量的方法与装置。该测量装置以稳定度较高和抗干扰性强的双纵模热稳频He -Ne激光器为光源 ;以拍波合成的场强信号的节点为对准标志 ;以光路组合形成的双频激光干涉仪测量尾数部分。实验测量结果表明 :节点定位精度小于 0 .0 5mm ,尾数测量部分分辨率为 0 .0 8μm ,整个测量系统在 2 0m范围内的测量精度达± ( 5 0 +1.5× 10 - 6 L) μm(L为被测长度 ,单位为m)。
A precision measuring method and device for large dimension without guide are introduced in the paper.The frequency-stabilized double longitudinal modes He-Ne laser with thermoregulation is used as light source,which has high stability of frequency difference and good anti-disturbance performance.The node is used as sampling flag and the beat-wave fringe fraction is measured with double frequency interferometer combined by optical components.The experiments indicates that the accuracy of determining nodes is less than 0.05mm,the resolution for measuring fringe fraction is 0.08 μm,and the accuracy of the device is ±(50+1.5×10 -6 L)μm(L is the measured distance,unit m)in the range of 20 meters.
出处
《激光杂志》
CAS
CSCD
北大核心
2004年第3期80-81,共2页
Laser Journal
基金
国家自然科学基金资助项目 ( 5 0 2 75 10 1)
关键词
大尺寸测量
无导轨测量
双纵模热激光器
激光干涉仪
double longitudinal modes laser
large size measuring
node
laser interferometer
measurement without guide
