摘要
氮化硅是优良的陶瓷材料,应用十分广泛。本文论述了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施;采用双光束激发制备得到了超微非晶纳米氮化硅粉体。
Silicon Nitride is a kind of excellent ceramic material used in many areas.In this article,the general principles of LICVD (Laser Induced Chemical Vapor Deposition)are investigated and measures to reduce dissociated Si are put forward.By applying double beam optical stimulation,ultrafine and amorphous Si3N4 nano-powder can be obtained.
出处
《佛山陶瓷》
2004年第5期1-3,共3页
Foshan Ceramics
