摘要
采用化学池沉积(CBD)法,在3种不同衬底(玻片、ITO玻片、SnO2玻片)上沉积制备CdS多晶薄膜,并利用扫描电镜(SEM)、透射光谱、X射线衍射(XRD)和微电流高阻计等方法对沉积膜进行了测试分析,算出了CdS多晶薄膜的能隙宽度E0和电导激活能Ea,研究了CBD法中CdS多晶薄膜的生长沉积机制以及不同衬底对沉积效果的影响。结果表明:不同衬底的成膜效果差异较大,其中以SnO2玻片为衬底的沉积效果最佳。
A chemical bath deposition (CBD) method was used to prepare CdS polycrystalline thin films on the substrates of three different kinds(glass, ITO glass, SnO_2 glass). The crystal structure and microstructure of the CdS films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The optical transmission spectra was measured in the wavelength range from 400～600?nm with a spectrophotometer. The electrical, photoconducting and optical properties were studied. The results showed that CdS polycrystalline thin film on SnO_2 glass substrate is the most continuous, homogeneous and with high compactness.
出处
《四川大学学报（工程科学版）》
EI
CAS
CSCD
2004年第1期49-52,共4页
Journal of Sichuan University (Engineering Science Edition)
基金
国家自然科学基金资助项目(50076030)
国家863课题资助项目(2001AA513010)
国家973项目子课题资助项目(G2000028208)
