摘要
在氩氧混合气氛下近空间升华技术(CSS)制备CdTe多晶薄膜中,薄膜的结构、性质决定于整个沉积过程。深入研究沉积过程中的热交换、物质输运,有助于制备薄而致密的具有进行良好光电性质CdTe薄膜。通过分析近空间沉积的物理机制,测量近空间沉积装置内温度分布,对升温过程、气压与薄膜初期成核的关系进行讨论。研究结果表明,不同气压下制备的样品,均有立方相CdTe,此外,还有CdS和SnO2:F衍射峰,CdTe晶粒随气压增加有减小趋势;随气压的增加,透过率呈下降趋势,相应的CdTe吸收边向短波方向移动。在此基础上制备出转换效率优良的结构为SnO2:F/CdS/CdTe/Au的串联集成电池。
The structure and properties of CdTe thin films are dependent on the whole deposition process in closed-space sublimation(CSS) in Argon-based atmosphere. In this paper, the physical mechanism of CSS was analyzed, the temperature distribution in CSS system was measured, and the dependence of preliminary nucleus creation on increasing-temperature process and pressure was studied. The results showed that the samples depositing in the different pressure are all CdTe with cubical structure and have the diffraction peaks of CdS and SnO_2:F. Following the gas pressure increasing, the crystal size of CdTe decreases, the rate of the transparency of the thin film goes down and the absorption side faces to the short-wave direction. The integrated solar cells of better conversion efficiency in configuration of SnO_2:F/CdS/CdTe/Au was prepared.
出处
《四川大学学报（工程科学版）》
EI
CAS
CSCD
北大核心
2005年第2期59-62,共4页
Journal of Sichuan University (Engineering Science Edition)
基金
国家863计划资助项目(2003AA513010)
