摘要
采用射频磁控溅射法制备了FeCoB/SiO2纳米磁性多层膜,并对其微波特性进行研究。用微波谐振腔法测量了该薄膜的复磁导率,2GHz频率处复磁导率实部及虚部分别可达251和22.7。重点研究了多层膜结构中介质层厚度及薄膜总厚度对磁导率的影响,同时结合直流电阻率ρ、静态磁参数Bs、Hc的测量结果分析,探讨了纳米磁性多层膜的微波高磁导率机理,并提出了微波频率下获得高磁导率及低磁损耗的途径。实验结果也表明这种纳米磁性多层膜材料有望在高频平面变压器、平面电感器、薄膜电磁干扰抑制器等领域获得应用。
The nanomagnetic FeCoB/SiO_2 multilayer films were prepared by RF magnetron sputtering. The complex permeability of multilayer films were measured by microwave resonance cavity at 2GHz. Real part 251 and imaginary part 22.7 of complex permeability were obtained. The high permeability mechanism of multi-layer nanomagnetic films were analyzed using measured resistivity ρ, static magnetic parameter B_s and H_c. Basic methods were given to obtain high permeability and low loss at microwave frequency. These nanomagnetic multilayer films can be applied widely to high frequency plane transformers, plane inductors and film interference suppresser.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2004年第1期86-88,共3页
Journal of Functional Materials
基金
国家自然科学基金资助项目(50371029)
