摘要
聚二甲基硅氧烷 (PDMS)由于具有良好的力学性质和光学性质以及生物相容性等特点 ,是极具前景的 μTAS应用材料[1] 。由于固化后的PDMS表面具有一定的粘附力 ,一对成型后的PDMS基片不加任何处理 ,即可借助分子间的引力自然粘合 ,但这种粘合强度有限 ,容易发生漏液。Duffy[2 ] 等人采用高真空氧等离子体对PDMS进行处理 ,实现了PDMS芯片的永久性键合。但这种键合技术需要昂贵的高真空等离子体发生设备。孟斐[3]
A method was developed for bonding the poly(dimethylsiloxane) (PDMS) fabricated microfluidic replica. After the surface of PDMS was treated by oxygen plasma 10～40s under medium vacuum (lower than 13.33Pa), the PDMS plates were irreversibly sealed when the treated surfaces were brought into touch and 1h incubation at 100℃. And the hydrophilic behavior of PDMS replica was improved greatly. Compared with the reported procedures using oxygen plasma pretreatment under high vacuum, the present approach need simpler and cheaper equipment. And shorter treating time is benefit to keep the surface structure of the replica for little temperature rising.
出处
《微纳电子技术》
CAS
2003年第7期369-370,共2页
Micronanoelectronic Technology
