摘要
随着MEMS技术的不断发展 ,微加工工艺的仿真和模拟越来越受到人们的关注。简要介绍了国外干法刻蚀工艺模拟工具的发展情况 ,主要包括美国的SPEEDIE、日本的MORDERN和DEER。
This paper briefly introduces the research development of dry etching simulator abroad, which mainly includes SPEEDIE developed in US, MORDERN and DEER in Japan. Finally we briefly introduce the simulator DROPIE developed domestically.
出处
《微纳电子技术》
CAS
2003年第7期5-7,共3页
Micronanoelectronic Technology
