摘要
为了使研究者能更详细地了解类金刚石(DLC)薄膜的研究现状,综述了类金刚石薄膜的特性及应用,分析对比了目前常用的一些类金刚石薄膜的制备方法,包括物理气相沉积法(PVD)和化学气相沉积法(CVD),并对类金刚石薄膜的抗强激光损伤特性以及提高其激光损伤阈值的方法进行了论述。结果发现,利用PVD法制备的DLC膜的硬度可以达到40GPa^80GPa,且薄膜的残余应力可以达到0.9GPa^2.2GPa之间,而CVD法则由于反应气体的充入导致类DLC薄膜的沉积速率大大降低,故使用率不高。同时,优化膜系的电场强度设计,采用合理的制备工艺,进行激光辐照后处理,施加外界电场干预均可有效地提高DLC薄膜的抗激光损伤能力,且目前的DLC薄膜的激光损伤阈值可达到2.4J/cm2。
In order to make the research status of diamond-like carbon(DLC)thin-films be well understood,the characteristics and applications of the DLC thin films were reviewed,and the preparation technologies were compared and analyzed,including the physical vapor deposition(PVD)methods and the chemical vapor deposition(CVD)methods.And the laser-induced damage properties and the methods to improve the laser-induce damage threshold of DLC films were discussed.The results show that the hardness and the residue stress of DLC films deposited by the physical vapor deposition methods can respectively reach to 40GPa^80GPa and0.9GPa^2.2GPa,but the chemical vapor deposition methods has been less used because the deposition rate of DLC films decreases greatly introduced by the reaction gas.Moreover,some methods of the optimization of the electrical field intensity of film stack,the reasonable preparation technology,the laser conditioning,and the application of external electrical field can effectively improve the laser-induced damage threshold of DLC films,and the laser-induced damage threshold of DLC films can get 2.4J/cm2 at present.
出处
《应用光学》
CAS
CSCD
北大核心
2015年第5期799-806,共8页
Journal of Applied Optics
基金
国家自然科学基金项目(61378050
61205155)
科技部国际合作项目(2013DFR70620)资助
陕西省教育厅科研计划项目资助(2013JK0632)
关键词
薄膜
类金刚石
制备工艺
激光损伤
film
diamond-like carbon(DLC)
preparation technology
laser-induced damage
