摘要
目的比较分析氢元素对类金刚石涂层摩擦性能的影响,研究含氢和无氢DLC涂层在铣削ZL108铝合金时的切削性能。方法分别采用等离子体增强化学气相沉积(PECVD)和磁控溅射物理气相沉积(MS)制备含氢和无氢DLC涂层,并采用三维形貌仪对涂层基片表面形貌进行表征,通过切削实验分析两种涂层铣刀的切削性能。结果MS制备的无氢DLC涂层结构致密,无凹坑、针眼等缺陷。在摩擦磨损试验时发现,无氢DLC涂层磨损率(3.58×10^–6 mm^3/N)明显小于含氢DLC涂层(4.62×10^–6 mm^3/N),即无氢DLC涂层的耐磨性能更好。结论采用MS制备的无氢DLC涂层,表面无明显缺陷,并且具有更优异的摩擦性能。在铣削ZL108铝合金时,减摩性、耐磨性以及抗粘附性能均比含氢DLC涂层铣刀表现得更加优异,被加工的铝合金表面质量更好,产生的切屑表面更加光滑。
The paper aims to compare and analyze the influences of hydrogen on the tribological performance of diamond-like coating,and study the cutting performance of DLC coatings with or without hydrogen.Hydrogen free and hydrogen coatings were prepared through plasma enhanced chemical vapor deposition(PECVD)and magnetron sputtering physical vapor deposition(MS).The surface topography of the coatings was characterized by three-dimensional topography instrument,and the cutting performance of two coating milling cutters was analyzed by cutting experiments.The results showed that the hydrogen-free coating had dense structure,without pits,pinholes and other defects.The wear rate of hydrogen-free DLC coating(3.58×10^–6 mm^3/N)was lower than that of hydrogen DLC coating(4.62×10^–6 mm^3/N),thus hydrogen-free DLC coating showed better wear resistance.Hydrogen-free DLC coating deposited by MS has no apparent surface defects.It has excellent tribological performance.It also shows better wearing resistance,abrasion resistance and adhesion resistance in the milling test against ZL108 aluminum alloy.The machined surface and chip surface quality obtained by applying hydrogen-free DLC coating were better than that obtained by applying a-C:H coating.
作者
张而耕
张致富
周琼
黄彪
陈强
沈秀国
陈亚楠
ZHANG Er-geng;ZHANG Zhi-fu;ZHOU Qiong;HUANG Biao;CHEN Qiang;SHEN Xiu-guo;CHEN Ya-nan(Shanghai Engineering Research Center of Physical Vapor Deposition(PVD)Superhard Coating and Equipment,Shanghai Institute of Technology,Shanghai 201418,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2020年第1期356-363,共8页
Surface Technology
基金
国家自然科学基金(51971148)
上海市科委重点支撑计划(170905038000)
上海市联盟计划(LM201904)~~
