摘要
毫米波频段矢量网络测试是射频半导体器件建模和电路设计中不可缺少的环节。提出了一种新型的旨在提高毫米波频段测试精度的校准方法。该方法通过反向注入回波的方式来降低毫米波频段矢量校准中传输线原始测量数据的不确定性,进而降低了校准过程中对校准件精度的要求,获得了更具鲁棒性的校准误差模型参数。基于国产AV3672矢量网络分析仪在1～50 GHz内对该校准方法相较于传统校准方法的有效性进行了验证。采用这种方法校准后,直通校准件的S_(21)测试误差下降至0.02 dB,短路校准件S_(11)误差下降至-50 dB。实验结果证明,该方法在不依赖于昂贵的附加仪器仪表设备的同时,明显提升了毫米波矢量测试精度,而且算法复杂度并没有急剧增加,具备极强的实用性和通用性。
Mili-meter wave vector network analysis measurement is an indispensable part in RF semiconductor device modelling and circuit design process. A novel calibration procedure aimed to improve the accuracy of mm-wave band measurement is proposed in this paper. This method uses reverse active signal substitution to decrease the uncertainty of the raw thru s-parameter measurement data of the transmission line in mm waveband vector calibration and reduces the accuracy requirement of the calibration kit in the calibration process, thus obtains more robust calibration error model parameters. A 1~50 GHz on-wafer measurement system based on Ceyear AV3672 VNA was built, the test result was compared with that of traditional calibration method to verify the effectiveness of the proposed method. It is shown that with this method the S21 measurement error of thru calibration standard kit is decreased to 0.02 dB, and the S11 measurement error of short calibration standard kit is decreased to-50 dB. The experiment result proves that the proposed method has clearly improved the measurement accuracy of mm wave vector network analysis without using expensive additional instruments, the complexity of the calibration algorithm is not increased significantly;the method has strong practicability and generality in mm-wave test applications.
作者
苏江涛
郭庭铭
杨保国
王翔
郑兴
Su Jiangtao;Guo Tingming;Yang Baoguo;Wang Xiang;Zheng Xing(College of Electronics and Information,Hangzhou Dianzi University,Hangzhou 310018,China;Science and Technology on Electronic Test&Measurement Laboratory,Qingdao 266000,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2019年第1期77-84,共8页
Chinese Journal of Scientific Instrument
基金
浙江省自然科学基金(LY17F010016
LY17F010017
LZ17F010001
LQ15F010005)
国家自然科学基金(61727804
61701147
61827806
61871161)
装备预研重点实验室基金(61420010101)项目资助
关键词
校准技术
毫米波测试
在片测试系统
矢量网络分析仪
器件模型
calibration technique
mm-wave test
on-wafer measurement system
vector network analysis(VNA)
device model
