摘要
同位素纯硅片具有特殊的物理性质,在信息技术领域有着非常广阔的应用前景。为获得高丰度28Si,利用国产的高速气体离心机,选择SiF4作为分离的工作介质,对硅同位素进行了离心分离实验。通过单机分离实验,调整气体离心机的有关参数,摸索出适合级联分离的单机参数,同时得到气体离心机分离硅同位素的单位质量数的全分离系数γ0。利用由4台离心机组成的级联,经过6个阶段的分离,得到了28Si丰度达到99.5%的样品。实验结果表明,离心法分离硅同位素是完全可行的。
Isotopically pure silicon wafers have many special physical characteristics with potential important applications in information technology. The enrichment of 28Si to high concentrations was investigated experimentally using SiF4 as the working substance in domestically made highspeed gas centrifuges. The centrifuge parameters were chosen for SiF4 separation with the overall unit separation factor, γ0, determined for a single gas centrifuge. 28Si was enriched to a concentration 99.59% in six separation runs using a short cascade composed of only four gas centrifuges. The experimental results show that gas centrifuges can effectively separate the silicon isotope.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2003年第6期729-731,共3页
Journal of Tsinghua University(Science and Technology)
基金
国家"九五"科技攻关项目(95-219)
