摘要
文章对^28Si同位素的应用背景进行概述,并介绍分离。^28Si同位素的几种具体方法和国内外的分离研究现状,认为同位素纯^28Si材料将会在未来的高级微电子芯片等领域中获得很好的发展。
The applied background of ^28Si isotope was summarized in the paper, and a series of methods in separating ^28Si were introduced. And it is thought that the products of isotope ^28Si will have a good development in the fields of micro-electronics chips etc. in the future.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2006年第B09期200-203,共4页
Atomic Energy Science and Technology