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^28Si同位素应用背景及分离研究现状概述 被引量:1

Summarization About Applied Background of ^28Si Isotope and Actuality in Separating ^28Si
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摘要 文章对^28Si同位素的应用背景进行概述,并介绍分离。^28Si同位素的几种具体方法和国内外的分离研究现状,认为同位素纯^28Si材料将会在未来的高级微电子芯片等领域中获得很好的发展。 The applied background of ^28Si isotope was summarized in the paper, and a series of methods in separating ^28Si were introduced. And it is thought that the products of isotope ^28Si will have a good development in the fields of micro-electronics chips etc. in the future.
出处 《原子能科学技术》 EI CAS CSCD 北大核心 2006年第B09期200-203,共4页 Atomic Energy Science and Technology
关键词 ^28Si 同位素 丰度 分离 ^28Si isotope abundance separation
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参考文献14

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