摘要
随着微机械结构工艺的改进,声表面波静电力闭环方案必会以其不可替代的优势成为一个发展方向。本文阐述了静电力发生器的结构,提出并研究了用脉宽调制反馈力线性化静电力发生器的方法。结合声表面波器件的实际加工技术,对声表面波加速度计静电式力反馈方案进行了详细分析,并通过仿真给出了该方案中系统参数的范围以及最优参数下的系统特性曲线。
With the improvement of micro-mechanism technique,electrostatic force closed loop plan of SAW accelerometer will lead a new derection for its unique advantage.The structure of the electrostatic producer is expatiated,and the method with which the pulse-width modulation feedback force linearizes the electrostatic force producer is purposed.Combined with machining technique of SAW device,the electrostatic force feedback closed loop plan of SAW accelerometer is analyzed,then the range of the system parameters and the characteristic curve with the ideal parameter from simulation are given.
出处
《测控技术》
CSCD
2003年第9期6-10,共5页
Measurement & Control Technology
基金
航空科学基金资助项目
关键词
声表面波加速度计
静电式力反馈
静电力发生器
二元脉冲调宽静电力闭环方案
SAW accelerometer
electrostatic force feedback
electrostatic force producer
two state pulse width modulation electrostatic force closed loop plan
