摘要
超精密磨削轴对称非球面光学器件是提高加工效率和加工精度的有效方法。根据轴对称非球面的轴对称性采用了加工简便的二轴联动超精密磨床,给出了NC加工中的砂轮中心位置计算的几何模型,分析了加工中影响精度的主要误差源及所产生的误差,提出了相应的误差补偿策略,并给出砂轮形状改进方法。
Ultraprecision grinding optical aspheric surfaces are an effective approach to increasing the production efficiency and precision. The geometric model of the center of the grinding wheel is provided by employing 2axis ultraprecision grinding machine according to the symmetry of the axisymmetric optical aspheric surface, and the main error sources and the errors is presented. The methods of compensating the corresponding errors and bettering the shape of the grinding wheel are introduced.
出处
《光学技术》
CAS
CSCD
2003年第3期329-333,共5页
Optical Technique
