期刊文献+

振动式微机械陀螺的等效电学模型 被引量:3

EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE
下载PDF
导出
摘要 根据振动式微机械陀螺的工作原理,建立了其机械特性的等效电路模型。陀螺差分检测电容模型和振动的等效电路模型构成了陀螺的等效电学模型,该模拟模型组合了传感器的机械特性和电学特性。陀螺等效电学模型通过电路模拟工具PSPICE实现,可用于分析陀螺的振动特性、对角速度的频响特性,优化陀螺的工作方式;还可以与接口电路混合模拟,分析陀螺和检测电路的整体性能,优化检测电路的设计。 An equivalent circuit model of vibratory micro- machined gyroscope's mechanical properties is derived according to its working principle. Equivalent electrical model of gyroscope consists of differential detection capacitance model and equivalent circuit model of oscillating. This simulated model combines the sensor's electrical property with mechanical property. The model is implemented in the circuit simulated tool which is called PSPICE, equivalent electrical model of gyroscope is available in oscillating properties analysis and frequency response to angular rate analysis to optimize its working mode. The model also enables the sensor simulate with the interfacing electronics and analyze the whole character of the sensor and its circuit, thus optimizing design of testing circuits.
出处 《机械工程学报》 EI CAS CSCD 北大核心 2003年第3期117-120,125,共5页 Journal of Mechanical Engineering
基金 国家973资助项目(G1999033101)。
关键词 微机械陀螺 等效电学模型 振动式 Micromachined gyroscope Equivalent electrical model
  • 相关文献

参考文献5

  • 1[1]Veijola T. Accelerometer model in APLAC. Tech. Rep. CT-18, Helsinki Universityof Technology, Circuit Theory Laboratory, 1994(2):1~55 被引量:1
  • 2[2]Veijola T, Kuisma H, Lahdenperg J, et al. Equivalent circuit model of the squeezed gas film in a silicon accelerometer. Sensors and Actuators A, 1995, 48:239~248 被引量:1
  • 3阮爱武,李万玉,冯培德.硅微机械音叉陀螺检测灵敏度与固有频率的关系[J].传感器技术,1998,17(1):12-15. 被引量:2
  • 4[4]Oh Y S, Lee B L, Baek S S, et al. A tunable vibratory microgyroscope. Sensors and Actuators A, 1998, 64:51~56 被引量:1
  • 5[5]Park K Y, Lee C W, Oh Y S, et al. Leaterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs. Sensors and Actuators A, 1998, 64:69~76 被引量:1

二级参考文献1

  • 1Tang W C,Sensors Actuators A,1989年,20卷,25页 被引量:1

共引文献1

同被引文献24

引证文献3

二级引证文献12

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部