摘要
为减小杂散电容提高信噪比,分析了硅微机械陀螺仪结构中的电容。并以某硅微机械陀螺仪的理 论模型为对象,建立了陀螺仪结构中的电容模型。对每种电容进行了理论分析,并借助电路仿真软件对 模型进行了仿真,分析了杂散电容对输出的影响,结果表明布线与活动结构间的电容对输出有很大的影 响。提出了采用新工艺和合理的布线方法减小与活动结构间的电容,从而提高信噪比。
The capacitances in the structure of silicon micromachined gyroscope（SMG） are analyzed, in order to reduce parasitic capacitances in the structure and increase the signal noise ratio（ SNR）. The capacitance model of the SMG structure is established. Each capacitance in the model is analyzed in theory and simulated with the simulation software of circuit. The impacts of these capacitances on output signal are analyzed, and the results indicate that disposal wires on the substrate have made a great impact on output signal. At last, some methods, such as the adoption of SOI craftwork and reasonable disposal wires, are put forward to decrease the parasitic capacitances.
出处
《测控技术》
CSCD
2005年第11期9-12,共4页
Measurement & Control Technology
基金
国家高技术研究发展计划(863计划)课题(2002AA812038)总装备部十五国防预研课题(41308050109)
关键词
硅微机械陀螺仪
信噪比
杂散电容
电容模型
silicon micromachined gyroscopes（SMG）
SNR
parasitic capacitance
capacitance model
