摘要
微机电系统 (MEMS)测试技术及方法是MEMS设计、仿真、制造及质量控制和评价的关键环节之一 ,本文对MEMS测试技术及方法所涉及的微机械量、微几何量、微材料特性以及系统综合参数与性能的测试技术及方法进行了讨论。重点介绍了光学及光电检测技术在微机电系统检测中的应用 ,对计算机微视觉检测技术在微机电系统检测中的应用进行了探讨。
The rapid development of microelectromechanical systems (MEMS) makes i t necessary to have precise measurement during the design , simulation, fabrication, and evaluation of MEMS. The MEMS measu r ement technologies and methods are reviewed from the viewpoints of mechanical pa ramet ers,geometric dimensions and material properties on a micro-scale. The micro-vi si on metrology technology, the interferometer and some optoelectronic detection me thods used for measurement are discussed in detail.
出处
《光学精密工程》
EI
CAS
CSCD
2003年第1期37-44,共8页
Optics and Precision Engineering
