摘要
针对微机械陀螺特征尺寸小、振动频率高,其动态特性难以精确评价的问题,提出了基于高速摄像技术、显微技术与数字图像相关技术的测试方案。并用此方法测量了双线性振动陀螺的固有频率、品质因子、—阶模态振型和杨氏模量。实验数据表明,系统分辨率可达0.01μm,不同驱动频率下所测振子响应频率误差小于0.023%。
To evaluate the dynamic characteristics of Micro-Gyroscope with small dimension and high vibration frequency, a new measurement setup based on the high speed camera armed with microscope and digital image technique was presented. The natural frequency, quality factor, first mode of fold beam and Young's modulus of the double linear vibratory gyroscope were measured by the new setup. The experimental results show the sensitivity of this setup is up to 0.01 μm and relative errors in different driving frequencies are less than 0. 023%.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第1期121-126,共6页
Optics and Precision Engineering
基金
国家自然科学基金(No.10472026)
关键词
双线性振动陀螺
固有频率
品质因子
杨氏模量
高速摄影
double linear vibratory gyroscope
natural frequency
quality factor
Young's modulu
high speed photography