摘要
为适应三维光学微细加工及三维光学信息存储研究的需要,研制了共聚焦激光扫描荧光显微镜的工作台式扫描系统,扫描范围138μm×138μm。工作台采用压电陶瓷驱动器(PZTactuator)驱动的方式来获得高分辨率的位移,采用带柔性铰链的杠杆放大装置来获得较大的位移范围。描述了工作台的工作原理,并对其静态和动态性能进行了测试,实验表明这一扫描系统能很好的应用于共聚焦激光扫描荧光显微镜系统。
For adaptation of 3D optical microfabrication and 3D optical data storage, we have developed a stage_scanning system for a confocal laser scanning fluorescence microscope (CLSM) with 138μm x 138μm field of view. The stage employs flexure hinges driven by piezoelectric (PZT) actuators to achieve high positioning accuracy and large scanning area. This paper describes the principle of the stage, and the testing of the static and dynamic properties. The whole system has been testified to work well for confocal laser scanning microscopy .
出处
《光学精密工程》
EI
CAS
CSCD
2002年第6期582-587,共6页
Optics and Precision Engineering
基金
百人计划"及其创新基金项目资助
