摘要
基于矢量衍射理论,分析和比较了两种等光程的半球形(h-SIL)和超半球形(s-SIL)固体浸没透镜的光场分布,计算了4种材料(玻璃,Si,GaP,金刚石)SIL的焦深和光斑大小。结果表明:当数值孔径相同时,h-SIL的焦深较s-SIL的焦深大,焦深对SIL的折射率比较敏感,而光斑大小对波长照明比较敏感。h-SIL的焦深随透镜数值孔径的增加迅速单调减小,而s-SIL的焦深随透镜数值孔径的增加呈现出只一个周期的振荡行为。s-SIL对透镜的数值孔径要求较低,它更适合应用于高密度光存储和精密光刻。
The optical field distributions for two types of aplanatic Solid Immerision Lenses（SILs） of hemisphere （h-SIL） and supersphere （s-SIL） were analyzed by using the vector diffraction theory. The focal depths and spot sizes of the SILs for four materials （glass, silicon, gallium-phosphide, and diamond） were simulated. The results show that the focal depth of the h-SIL is greater than that of the s-SIL. The focal depth of the system is sensitive to the refractive index of the SIL and the spot size is sensitive to the illuminating wavelength. As NA （numerical aperture of lens） increases, the focal depth of the h-SIL decreases rapidly and monotonously, whereas the focal depth of the s-SIL has a one-period-only oscillatory behavior. Compared with the h-SIL, the s-SIL has an advantage that it lowers the demands for large-NA lenses in some applications, so that it is preferable to the applications in high-density optical storage and subtle photolithography.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第3期356-359,共4页
Optics and Precision Engineering
基金
浙江省教育厅科技项目(No.20040330)
关键词
固体浸没透镜
高密度光存储
焦深
solid immersion lens
high-density optical storage
focal depth
