摘要
近年来,真空微电子学的发展引人瞩目,它的应用十分广泛,普遍认为真空微电子学是继真空管、集成电路之后电子学发展中又一新产业的标志,本文主要探讨真空微电子的发展背景。
In recent years, vacuum microelectronics has been rapidly developed and finds wide applications. It is considered to be new landmark after vacuum tube, integrated circuit during the development of electronics. This paper discusses mainly the background of vacuum microelectronics rise.
出处
《电子器件》
CAS
1992年第1期4-6,共3页
Chinese Journal of Electron Devices
关键词
真空电子学
微电子学
Vacuum electronics, Microelectronics.
